Description
Features
- Reduces gas pressure of up to 120 psi (8.27 bar) to near atmospheric pressure
- For monitoring and testing to ISO 8573-1 and SEMI E49.8 limits
- Compatible with 0.1 cfm AeroTrak Particle Counters (both remote and handheld models) and AeroTrak Cleanroom Condensation Particle Counter Model 9001
- Exhaust HEPA filter protects HPD accessory from contamination when disconnected from compressed gas source
- No manual adjustments or calibration required
- For use with Clean Dry Air (CDA), Nitrogen (N 2 ) and Argon (Ar)
- Passivated stainless steel enclosure resists cleanroom chemicals
- 0.1 cfm (2.83 lpm) nominal flow rate